Name |
BTZ-3000 AUTO PROBE DEVICE |
|
片台X轴行程 |
Stroke of wafer-stage in X direction |
110mm |
片台Y轴行程 |
Stroke of wafer-stage in Y direction |
110mm |
测试范围 |
Test range |
110mm×110mm |
片台Z轴高度行程Max |
Stroke in hight of wager-stage in Z direction |
6mm |
测试芯片最大尺寸 |
Maximum dimension of test chip |
4英尺(根据客户要求改成6英寸片台,测试行程不变) 4inches |
承片台转角 |
Angel of the wafer-stage |
±30° |
外形尺寸 |
repeat precision |
580×440×260mm不包含显微镜高度 Not includingthe hight of the microscope |
重量 |
Weight |
24kg |
打点器电源 |
Power |
24V |
显微镜 |
microscope |
Binocular stereomicroscope |
放大倍数 |
magnification times |
4~100 |